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Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu: Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface, Journal of Robotics and Mechatronics, Vol ...
... Precision Engineering journal homepage: www.elsevier.com/locate/precision Profile measurement of a wide-area resist surface using a multi-ball cantilever system Shujie Liu, Kentaro ...
... of the 6 th eu spen International Conference - Baden bei Wien - May 2006 Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface Shujie LIU ...
Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, and Kiyoshi Takamasu, pp. 698-704 Abstract Full Text (PDF366KB) Paper: Particle Detection for 100-nm Patterned Wafers by Evanescent ...
Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, and Kiyoshi Takamasu, pp. 698-704 Abstract | Preview | Full Text (PDF366KB) Paper: Particle Detection for 100-nm Patterned Wafers by ...
Academic Leader . Shujie Liu . Famous prefessor. She was born in February,1946. The standing Committee on Chinese Medical Association of Stomatology specializing in the ...
Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu: Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface, Journal of Robotics and ...
... International Conference - Baden bei Wien - May 2006 Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface Shujie LIU, Shuichi ...
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