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To, E. Duch, I. Babich, R. Carruthers, P. Saunders, G. Walker, Y. Zhang, M. Steen, and M. Ieong: IEDM Tech. Dig., 2003, p. 49. T. A. Langdo, M. T. Currie, Z.-Y. Cheng, J ...
J. Kedzierski, D. Boyed, Y. Zhang, M. Steen, F. F. Jamin, J. Benedict, M. Ieong and W. Haensch: IEDM Tech. Dig., 2003, p. 441. J. Kedzierski, D. Boyed, P. Ronsheim, S ...
D. S. Wavhal, J. Zhang, M. L. Steen, and E. R. Fisher: Plasma Process. Polym. 3 (2006) 276. N. Inagaki, V. Cech, K. Narushima, and Y. Takechi: J. Appl. Polym.
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