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... and Gas Density Depletion on High Repetition Glow Discharges in an ArF Excimer Laser for Microlithography: 1060-1066: Takanobu Ishihara, Tsukasa Hori, Kouji Kakizaki and ...
Koji Kakizaki, Takayuki Yabu 1, Tsukasa Hori 1, Hakaru Mizoguchi and Yosuke Sakai 2. GT Development Project, in cooperation with Ushio Inc., Komatsu Ltd., and Gigaphoton ...
... of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light: Koji Kakizaki, Takayuki Yabu, Tsukasa Hori ...
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