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Tsutomu Tsukada, Supika Mashiro and Kimiko Mashimo ANELVA Corporation, 8-1 Yotsuya 5-chome, Fuchu, Tokyo 183 (Received May 13, 1993; accepted for publication August 21, 1993)
Junko Nakatsuru, Hiroki Date, Manabu Ikemoto, Supika Mashiro: As conventional Si based device structures are approaching their physical limits ...
Si/SiGe Selective Epitaxial Growth by a Single-wafer Cold-wall UHVCVD System - Supika Mashiro, Hiroki Date, Junko Nakatsuru, Satoshi Hitomi, and Junro Sakai (Anelva ...
Tsutomu Tsukada, Supika Mashiro and Kimiko Mashimo ANELVA Corporation, 8-1 Yotsuya 5-chome, Fuchu, Tokyo 183 (Received May 13, 1993; accepted for publication August 21 ...
Junko Nakatsuru, Hiroki Date, Manabu Ikemoto, Supika Mashiro: As conventional Si based device structures are approaching their physical ...
Junko Nakatsuru, Hiroki Date, Supika Mashiro and Manabu Ikemoto Canon ANELVA Corporation, 5-8-1 Yotsuya Fuchu Tokyo 183-8508 Japan,
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