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X. B. Tian, Ricky, K. Y. Fu, P. K. Chu* (City University of Hong Kong) “Plasma immersion ion implantation (PIII) — A challenging ion implantation technique”
Miatsu Okitsu; Chian Rui Di; Cheung Yiu Ho; Tian Ricky; Yee Ket Yong; Khairul Anwar Bin Jalaludin; Ahmad Rizal Bin Ramlan; Mansor B Hussain; Low Ryh Sheng
X. B. Tian, Ricky, K. Y. Fu, P. K. Chu* (City University of Hong Kong) Plasma immersion ion implantation (PIII) A challenging ion implantation technique
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