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Inventor: Alan J Jensen Mario Stella; Eugene Zhao; Peter Renteln; Jeffrey Farber Assignee: Lam Research Corporation Title: Method and apparatus for controlling CMP pad surface finish ...
Eugene Zhao, C. Shan Xu, "Direct CMP for STI", Semiconductor International, June, 2001. 2. Laura Peters, "Choices and Challenges for Shallow Trench Isolation", Semiconductor ...
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Goodyear EPD (Mechanical or Industrial Engineering industry): Asia President, (2003-2006)