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Evaluation of Copper CMP with Ruthenium Liner Layer for Advanced Copper Deposition Technologies Samrat Paul *, Huey-Ming Wang * and Katsuyuki Musaka * EBARA Technologies, Inc *. ...
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Ebara Corp. (Chemicals industry): General Manager, Marketing, (July 2003-August 2006)
Applied Materials (Chemicals industry): Sr.Member of Technical Staff...