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XPS Depth Profile Analysis of ArF Immersion Resists by using C 60 Ion Beam: 348-353: Yuichi YAMAMOTO, Naoko SHIROTA and Kiyoshi YAMAMOTO: Release Date: July 22, 2007
Takuya Hagiwara 1, Takeo Ishibashi 1, Mamoru Terai 2, Naoko Shirota 3, Osamu Yokoji 3,
Takuya Hagiwara, Takeo Ishibashi, Mamoru Terai, Teruhiko Kumada, Naoko Shirota, Osamu Yokokoji, Takeshi Matsunobu, Naoki Man, Kazuhiro Yoshikawa, Yusuke Tanahashi and ...
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