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Jun Yamamoto, Ken Fujita, Nobuhiko Inoue, Haruki Nakamura and Koji Okano. Department of Applied Physics, Faculty of Engineering, The University of Tokyo
Low-damage Processes for Low-k Film using Advanced Neutral Beams.[International Symposium on Dry Process,(2003),127-132] Nobuhiko Inoue, Hiroto Ohtake, Takuya Ozaki, Eiichi Soda ...
Jun Yamamoto, Ken Fujita, Nobuhiko Inoue, Haruki Nakamura and Koji Okano L1721-L1723 : Initial Stages of Negative Point-to-Plane Breakdown in Helium
Structure and Electrical Properties of Thin Ta 2 O 5 Deposited on Metal Electrodes: Koichi Kishiro, Nobuhiko Inoue, Shih–Chang Chen and Masaki Yoshimaru
Jun Yamamoto, Ken Fujita, Nobuhiko Inoue, Haruki Nakamura and Koji Okano. Department of Applied Physics, Faculty of Engineering, The University of Tokyo
Low-damage Processes for Low-k Film using Advanced Neutral Beams.[International Symposium on Dry Process,(2003),127-132] Nobuhiko Inoue, Hiroto Ohtake, Takuya Ozaki ...
Structure and Electrical Properties of Thin Ta 2 O 5 Deposited on Metal Electrodes: Koichi Kishiro, Nobuhiko Inoue, Shih–Chang Chen and Masaki Yoshimaru
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