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In Situ Localized Annealing for Contamination Resistance and Enhanced Stability in Nickel Micromechanical Resonators Wan-Thai Hsu, Yinglei Yu, Clark T.-C. Nguyen, University of ...
In Situ Localized Annealing for Contamination Resistance and Enhanced Stability in Nickel Micromechanical Resonators Wan-Thai Hsu, Yinglei Yu, Clark T.-C. Nguyen ...
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