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KV Ling, WK Ho, BF Wu, Andreas Lo and H Yan, Multiplexed MPC for Multi-Zone Thermal Processing in Semiconductor Manufacturing, IEEE Transactions on Control Systems ...
KV Ling, WK Ho, BF Wu, Andreas Lo and H Yan. (2009). Multiplexed MPC for Multi-Zone Thermal Processing in Semiconductor Manufacturing. IEEE Transactions on Control ...
Andreas Hochhaus, Germany Hagop Kantarjian, USA Michael Lairmore, USA Francesco Lo Coco, Italy Michael Lübbert, Germany Roland Mertelsmann, Germany
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