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Al interconnection etching: Au-Etchant: Mixed soln. of KI/I 2: Au electrode etcing Au bump etching: 50% ACN: 50% Ammonium cerium nitrate soln. CrOx black matrix etching
When the ACA substance is etched in the 1% sodium cyanide solution, no reside of Au is found. However, since etching rate is very slow, it won't be a practical etchant.
- Al etching - Silicon etching - Poly etching - Cu etching - Au etching - Ti; TiW; TiN etching
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