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Moritaka Nakamura, Katsuhiko Iizuka and Hiroshi Yano. Process Development Division, FUJITSU LIMITED (Received July 4, 1989; accepted for publication August 19, 1989)
Moritaka Nakamura, Katsuhiko Iizuka and Hiroshi Yano 2147-2150 : Cold and Low-Energy Ion Etching (COLLIE) Nobuo Fujiwara, Teruo Shibano, Kyusaku Nishioka and Tadao Kato
Moritaka Nakamura, Katsuhiko Iizuka and Hiroshi Yano. Process Development Division, FUJITSU LIMITED (Received July 4, 1989; accepted for publication August 19, 1989)
Moritaka Nakamura, Katsuhiko Iizuka and Hiroshi Yano 2147-2150 : Cold and Low-Energy Ion Etching (COLLIE) Nobuo Fujiwara, Teruo Shibano, Kyusaku Nishioka and Tadao Kato
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