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Tackya Yammouch, Hirotaka Sugawara, Kenichi Okada, and Kazuya Masu
Improvement of Variable Ratio of On-Chip Variable Inductors Using Side Shield. Tackya Yammouch, Hirotaka Sugawara, Kenichi Okada and Kazuya Masu
Dependence of lithographic performance on light-shield border structure of EUV mask ... Kazuya Ota Taguchi Takao Osamu Suga: Study on counting error in particle inspection
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