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This temperature was measured with TEMP-PLATE (William Wahl Co.) under P + and As + implant. Then ion current was about 56 mA and acceleration energy was 70 keV.
Wahl, Dan The Conversion of SURF II to SURF III; Wait, Gary D. High Voltage ... The 10 keV Injector for the University of Maryland Electron Ring Project
We have studied the damage production by high-energy (100 keV10 MeV) H, He, Ne ... behavior of implanted Ca and Sr in GaN, B. De Vries, A. Vantomme, U. Wahl, J. G ...
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