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Masanori Kawakubo, Takahiro Sugaya, Osamu Hirai, Ken Tsugane (Hitachi, Ltd.), Kazunori Kadomura (A. L. M. T. Diamond Corp.), Yohei Yamada (Hitachi, Ltd.)
Accession number; 05A0528595: Title; Temperature effect on the formation of gold silicide clusters: Author; SUGAWARA KOICHI SUGAYA TOSHIO KUBO MASANORI ARAI ICHIRO
Hitachi,Ltd.Micro Device Division *Sugaya Takahiro,Kawakubo Masanori,Konishi Nobuhiro,Yamada Youhei : 2: The optimization of high Cu removal rate slurry with ...
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