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DOI: 10.1002/adma.200701085 Al-Doped TiO 2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors** By SeongKeunKim, Gyu-Jin Choi, Sang Young Lee, Minha Seo, Sang Woon ...
DOI: 10.1002/adma.200701085 Al-Doped TiO 2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors** By SeongKeunKim, Gyu-Jin Choi, Sang Young Lee, Minha Seo ...
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