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Munehiro Teranishi, Satoko Sato, Yoshiro Tani, Hideki Yamamoto, Toshihiko Makino, Kohji Tanaka, Shinya Sehata, Seiya Ogata, Mayumi Watanabe, Isao Igarashi, Naoyuki ...
Munehiro Teranishi, Satoko Sato, Yoshiro Tani, Hideki Yamamoto, Toshihiko Makino, Kohji Tanaka, Shinya Sehata, Seiya Ogata, Mayumi Watanabe, Isao Igarashi, Naoyuki ...
Takashi Ikehata, Yasuhito Igarashi, Naoyuki Sato, Toshio Tanabe and Hiroshi Mase 327-331 : Selective Plasma Etching for High-Aspect-Ratio Oxide Contact Holes
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