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Advanced Technology R&D Center, Mitsubishi Electric Corp. Shimpei Ogawa, Shinnosuke Soda, Shinichi Izuo, Yukihisa Yoshida: 13.6 Si Devices/Integration Technology
Akira Furuya, Eiichi Soda, Miyoko Shimada and Shinichi Ogawa. Semiconductor Leading Edge Technologies Inc. (Selete), 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
Shinichi CHIKAKI: Novel self-hydrophobication and Pre-reinforcement of Fine Pore Self ... Soda: Reduction Effect of Line Edge Roughness on TDDB lifetime of Cu/Low-k ...
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