Sumie Segawa

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Sumie Segawa

Locality:: Japan
Summary:: Simulation at Tokyo Electron
Experience:: Tokyo Electron (Public Company; 10,001 or more employees; Semiconductors industry): Simulation, (-)

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JJAP : Vol. 38 Part1 (1999) , No. 7B

Dependence of Driving Frequency on Capacitively Coupled Plasma in CF 4: Sumie Segawa, Masaru Kurihara, Nobuhiko Nakano and Toshiaki Makabe: Release Date: 19991001

JJAP ONLINE : Table of Contents

Sumie Segawa, Masaru Kurihara, Nobuhiko Nakano and Toshiaki Makabe 4423-4428 : A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte ...

JJAP : Vol. 38 Part1 (1999) , No. 7B

Dependence of Driving Frequency on Capacitively Coupled Plasma in CF 4: Sumie Segawa, Masaru Kurihara, Nobuhiko Nakano and Toshiaki Makabe: Release Date: 19991001

JJAP ONLINE : Table of Contents

Sumie Segawa, Masaru Kurihara, Nobuhiko Nakano and Toshiaki Makabe 4423-4428 : A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in ...

Sumie Segawa

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