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- 51 - Vladimir BLIZNETSOV Ph.D. Member of Technical Staff (SPT-PM) Institute of Microelectronics 11 Science Park Road Singapore Science Park II Singapore 117685 Phone: 67705725 E-mail : ...
Moitreyee Mukherjee-Roy, Vladimir Bliznetsov and Ganesh Samudra 1. Institute of Microelectronics, 11 Science Park Road 117685, Singapore 1 National University of Singapore, Kent Ridge ...
A Dual BARC method for Lithography and Etch for Dual Damascene with Low K: Moitreyee Mukherjee-Roy, Vladimir Bliznetsov and Ganesh Samudra: Release Date: 20070903
- 51 - Vladimir BLIZNETSOV Ph.D. Member of Technical Staff (SPT-PM) Institute of Microelectronics 11 Science Park Road Singapore Science Park II Singapore 117685 Phone: 67705725 E ...
Moitreyee Mukherjee-Roy, Vladimir Bliznetsov and Ganesh Samudra 1. Institute of Microelectronics, 11 Science Park Road 117685, Singapore 1 National University of Singapore ...
Wan Sik Hwang, Jing Hao Chen, Won Jong Yoo, and Vladimir Bliznetsov: Investigation of Etching Properties of Metal-nitride/ High-K Gate Stacks ...
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