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Univ. of Tokyo *Tokura Yuki 1, Kambara Makoto 1, Yoshida Toyonobu 1 : 5: Mesoplasma CVD for High Rate and Low Temperature Deposition of Si Thin Films With ...
Tokura, Yuki Master : Kato, Akihiro : Bachelor: 2007. 3 : Nose, Kenji : Doctor : Nakamura, Keisuke : Master : Hirose, Akira : Master : Aoshika, Kiyoshi : Bachelor
The Univ. of Tokyo 1 *Kenji Nose 1, Tokura Yuki 1, Nakamura Keisuke 1, Yoshida Toyonobu 1 : 10: Dependence of the deposition of amorphous carbon film on substrate ...
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